Tekinoroji chipangamazano weRSM achagovana newe zvakanakira cylindrical uye planar magnetron sputtering zvinangwa?Zvichienzaniswa nemamwe magineti ekupopotera tarisiro, cylindrical uye planar magnetron sputtering targets inochengeta zvakanakira coating yakanaka yekufanana yerectangular planar targets, uye inogona kuwedzera kushandiswa kwezvinangwa kuburikidza nenzira mbiri dzinotevera:
(1) Kana mapoka maviri (mana) emagomba e annular ari pamusoro pechinangwa asvika pahumwe hudzamu, musimboti wechinangwa (magineti chikamu) unogona kutenderedzwa 45 ° maererano nechubhu inotarirwa, kuitira kuti dzimwe nzvimbo dziri pachubhu inotarirwa. iyo isina kusvibiswa inogona kushandiswa;
(2) Kana chinangwa chepakati checylindrical uye planar magnetron sputtering chinangwa chakagadzirwa sechinhu chinotenderera chechinangwa (chinangwa chepakati chiri kutenderera panguva yekuputira), pamusoro pechinangwa chinogona kupepetwa kubva pasi nepamusoro pasina makomba.Panguva ino, chinangwa chichashandiswa zvakanyanya, uye chiyero chekushandiswa kwechinangwa chinogona kusvika 50% ~ 60% Kana chinangwa chacho chiri simbi inokosha, izvi zviri pachena kuti zvakakosha zvikuru.
Nekushandisa musimboti wemagineti ine pole shangu mucoaxial cylindrical magnetron sputtering chinangwa kugadzirisa dambudziko rekuguma magineti, iyo rectangular ndege yakananga inogona kushandurwa kuita cylindrical uye planar magnetron sputtering chinangwa, Chinangwa chinogona kuwedzera mwero wekushandiswa kwechinangwa. uchichengeta iyo yakanaka coating kufanana kweiyo rectangular ndege yakananga Kuti uvandudze mabhenefiti ehupfumi.
Nguva yekutumira: Jul-04-2022