Sezvatinoziva tese, maitiro ekuvandudza tekinoroji yezvigadzirwa zvemhando yepamusoro ane hukama zvakanyanya nemaitiro ekuvandudza tekinoroji yemafirimu muindasitiri yekunyorera yakadzika.Nekuvandudzwa kwetekinoroji yezvigadzirwa zvemufirimu kana zvikamu muindasitiri yekushandisa, tekinoroji yainonangwa inofanirawo kuchinja.Semuenzaniso, vagadziri veIc vachangobva kuisa pfungwa pakugadzirwa kwepasi resistivity copper wiring, iyo inotarisirwa kushandura zvakanyanya firimu rekutanga realuminium mumakore mashomanana anotevera, saka kukurudzirwa kwezvinangwa zvemhangura uye zvavanoda zvipingamupinyi zvinodiwa zvichakurumidza.
Uye zvakare, mumakore achangopfuura, flat panel display (FPD) yakanyanya kutsiva cathode-ray chubhu (CRT) -yakavakirwa komputa kuratidza uye terevhizheni musika.Ichawedzerawo zvakanyanya hunyanzvi uye musika kudiwa kweITO zvinangwa.Uye zvakare kune tekinoroji yekuchengetedza.Iko kudiwa kwema-high-density, hukuru-hukuru hwemadhiraivha akaoma uye epamusoro-density erasable discs inoramba ichiwedzera.Zvese izvi zvakakonzera shanduko mukudiwa kwezvinhu zvinonangwa muindasitiri yekushandisa.Mune zvinotevera, isu tichazivisa iwo makuru ekushandisa minda yechinangwa uye maitiro ekusimudzira echinangwa muminda iyi.
1. Microelectronics
Mune ese maindasitiri ekushandisa, iyo semiconductor indasitiri ine yakanyanya kuomesesa mhando yezvinodiwa zvemafirimu ekuputira.Silicon wafers ye12 inch (300 epistaxis) ikozvino yakagadzirwa.Hupamhi hwekubatanidza huri kuderera.Izvo zvinodikanwa zvevagadziri vesilicon wafer kune zvakanangwa zvikero zvakakura, kuchena kwepamusoro, kusarura kwakaderera uye zviyo zvakanaka, izvo zvinoda izvo zvinonangwa kuti zvive nani microstructure.Iyo crystalline particle dhayamita uye kufanana kwezvinhu zvakanangwa zvakaonekwa sezvinhu zvakakosha zvinokanganisa chiyero chekuisa firimu.
Kana ichienzaniswa nealuminium, mhangura ine yakakwirira electromobility kupikisa uye yakaderera resistivity, iyo inogona kusangana nezvinodiwa zvekondakita tekinoroji mu submicron wiring pazasi 0.25um, asi inounza mamwe matambudziko: kuderera kusimba simba pakati pemhangura uye organic medium zvinhu.Uyezve, zviri nyore kuita, izvo zvinotungamirira mukuora kwemhangura yekubatanidza uye kuparara kwedunhu panguva yekushandiswa kwechip.Kuti ugadzirise dambudziko iri, chipingamupinyi chinodzivirira chinofanira kuiswa pakati pemhangura uye dielectric layer.
Zvinhu zvinonangwa zvakashandiswa mubarrier layer ye copper interconnection zvinosanganisira Ta, W, TaSi, WSi, zvichingodaro. Asi Ta na W isimbi dzinoramba.Izvo zvakaoma kugadzira, uye alloys akadai se molybdenum uye chromium ari kudzidzwa sezvimwe zvinhu.
2. Yekuratidzira
Flat panel display (FPD) yakanganisa zvakanyanya cathode-ray chubhu (CRT) -based computer monitor uye musika weterevhizheni mumakore apfuura, uye ichafambisa tekinoroji uye kudiwa kwemusika kweITO zvinhu zvinonangwa.Kune marudzi maviri eITO zvinangwa nhasi.Imwe ndeye kushandisa nanometer state ye indium oxide uye tin oxide poda mushure mekupisa, imwe ndeye kushandisa indium tin alloy target.Firimu reITO rinogona kugadzirwa neDC reactive sputtering pane indium-tin alloy target, asi iyo yakanangwa ichaita oxidize uye inokanganisa sputtering rate, uye zvakaoma kuwana yakakura saizi alloy chinangwa.
Mazuva ano, nzira yekutanga inowanzo gamuchirwa kugadzira ITO yakanangwa zvinhu, iri sputtering coating nemagnetron sputtering reaction.Iine fast deposition rate.Ukobvu hwefirimu hunogona kudzorwa nemazvo, conductivity yakakwira, kuwirirana kwefirimu kwakanaka, uye kunamatira kwe substrate kwakasimba.Asi izvo zvinonangwa zvakaoma kugadzira, nekuti indium oxide netin oxide hazvitani kunyura pamwechete.Kazhinji, ZrO2, Bi2O3 uye CeO zvinosarudzwa sezvinowedzera sintering, uye izvo zvinonangwa zvine density ye93% ~ 98% yeiyo theoretical kukosha inogona kuwanikwa.Kuita kweITO firimu yakaumbwa nenzira iyi ine hukama hukuru nekuwedzera.
Iyo inovharira resistivity yeITO firimu yakawanikwa nekushandisa zvakadaro zvakanangwa zvinhu zvinosvika 8.1 × 10n-cm, iri padyo neresitorendi yeiyo yakachena ITO firimu.Saizi yeFPD uye conductive girazi yakakura kwazvo, uye hupamhi hwegirazi inoitisa inogona kusvika 3133mm.Kuti uvandudze mashandisirwo ezvigadzirwa zvinonangwa, ITO inonangwa zvinhu zvine maumbirwo akasiyana, senge cylindrical shape, inogadzirwa.Muna 2000, National Development Planning Commission uye Bazi reSainzi neTekinoroji yakabatanidza zvinangwa zvakakura zveITO muNhungamiro dzeNzvimbo Dzakakosha dzeIndasitiri yeRuzivo Parizvino Yakakosheswa kuBudiriro.
3. Kuchengeta kushandiswa
Nezve tekinoroji yekuchengetedza, kukwidziridzwa kwepamusoro-density uye yakakura-yakakura-yakakura hard disks inoda nhamba huru yehofori yekusada firimu zvinhu.Iyo CoF ~ Cu multilayer composite firimu chimiro chinoshandiswa zvakanyanya chehofori yekusada firimu.Iyo TbFeCo alloy target material inodiwa kune magineti disc ichiri mukumwe budiriro.Iyo magineti disc inogadzirwa neTbFeCo ine hunhu hwehombe yekuchengetedza, hupenyu hurefu hwesevhisi uye inodzokororwa isiri-kubata kudzima.
Antimony germanium telluride based phase change memory (PCM) yakaratidza kukosha kwekutengeserana, inova chikamu NOR flash memory uye DRAM musika imwe nzira yekuchengetedza tekinoroji, zvisinei, mukuita kwakawedzera kukurumidza kudzikisira rimwe rematambudziko ari munzira kuvepo kushomeka kwekugadzirisa zvakare. kugadzirwa kwemazuva ano kunogona kudzikiswa kuwedzera kuvharwa zvachose unit.Kuderedza reset ikozvino kunoderedza ndangariro kushandiswa kwesimba, kunowedzera hupenyu hwebhatiri, uye kunatsiridza data bandwidth, zvese zvakakosha maficha mune yanhasi data-centric, inotakurika zvakanyanya mutengi zvishandiso.
Nguva yekutumira: Aug-09-2022