Nekuvandudzwa kwemararamiro evanhu uye kuenderera mberi kwesainzi uye tekinoroji, vanhu vane zvakakwirira uye zvepamusoro zvinodiwa pakuita kwezvisingapfeki, zvinodzivirira corrosion uye yakakwirira-tembiricha inodzivirira yekushongedza coating zvigadzirwa.Zvechokwadi, kupfeka kunogonawo kushongedza ruvara rwezvinhu izvi.Zvino, ndeupi mutsauko uripo pakati pekurapwa kwe electroplating target uye sputtering target?Rega nyanzvi kubva kuTekinoroji Dhipatimendi reRSM vakutsanangurire iwe.
Electroplating chinangwa
Nheyo ye electroplating inopindirana neye electrolytic yekunatsa mhangura.Kana electroplating, iyo electrolyte ine simbi ions yeplating layer inowanzo shandiswa kugadzira mhinduro yekuisa;Kunyudza simbi chigadzirwa kuti plated kupinda plating mhinduro uye kuchibatanidza pamwe negative electrode of DC simba rekupa sezvo cathode;Iyo yakavharwa simbi inoshandiswa seanode uye yakabatana kune yakanaka electrode yeDC simba rekupa.Kana iyo yakaderera-voltage DC ikozvino yaiswa, iyo anode simbi inonyungudika mune mhinduro uye inova cation uye inoenda kune cathode.Maioni aya anowana maerekitironi pacathode uye anoderedzwa kuita simbi, iyo yakafukidzwa pane zvigadzirwa zvesimbi zvinoputirwa.
Sputtering Target
Musimboti uyu unonyanya kushandisa kuyerera kunopenya kubhomba maargon ions panzvimbo yakanangwa, uye maatomu epachinangwa anoburitswa oiswa panzvimbo yepasi kuita firimu rakatetepa.Zvimiro uye kufanana kwemafirimu akapushwa zviri nani pane zvemafirimu akaiswa mhute, asi kasidhi yekuisa inononoka kupfuura iyo yemafirimu akaiswa mupfunga.Midziyo mitsva yekupuruzira inenge inoshandisa magineti akasimba kutenderera maerekitironi kuti ikurumidze ionization yeargon yakatenderedza chinangwa, izvo zvinowedzera mukana wekudhumhana pakati pechinangwa neargon ions uye inovandudza sputtering rate.Mazhinji emafirimu esimbi ekuisa simbi ndeye DC sputtering, nepo asiri-conductive ceramic magineti zvinhu ari RF AC sputtering.Nheyo yakakosha ndeye kushandisa kupenya kuburitsa muvacuum kubhomba pamusoro pechinangwa nemaargon ions.Iyo cations muplasma inomhanyisa kumhanyisa kune iyo yakaipa electrode kumusoro seyakapushwa zvinhu.Iyi bhomba ichaita kuti chinonangwa chibhururuke chobva chaisa pane substrate kuita firimu rakatetepa.
Sarudzo yemhando yezvinhu zvinonangwa
(1) Chinangwa chinofanira kunge chine simba rakanaka remagetsi uye kugadzikana kwemakemikari mushure mekugadzirwa kwefirimu;
(2) Iyo firimu zvinhu zveiyo reactive sputtering firimu inofanira kunge iri nyore kugadzira firimu rekomboni ine reaction gasi;
(3) Chinangwa uye substrate inofanira kunge yakanyatsobatanidzwa, kana zvisina kudaro, iyo firimu zvinhu zvine simba rakanaka rekusunga ne substrate ichagamuchirwa, uye firimu rezasi richatanga kuputika, uye ipapo firimu rinodiwa richagadzirirwa;
(4) Pachikonzero chekusangana nezvinodiwa zvemafirimu ekuita, diki mutsauko pakati peiyo thermal yekuwedzera coefficient yechinangwa uye substrate, zviri nani, kuitira kuti kuderedza kukanganiswa kwekupisa kwekushushikana kwefirimu rakapwanyika;
(5) Zvinoenderana nekushandiswa uye kuita zvinodiwa zvemufirimu, chinangwa chinoshandiswa chinofanirwa kusangana nezvinodiwa zvehutsanana, hutsvina hwemukati, chikamu chakafanana, kunyatsoita machining, nezvimwe.
Nguva yekutumira: Aug-12-2022