Sezvatinoziva tese, vacuum evaporation uye ion sputtering inowanzoshandiswa mukuputira vacuum.Ndeupi musiyano uripo pakati pe evaporation coating uye sputtering coating?Tevere, nyanzvi dzehunyanzvi kubva kuRSM dzichagovana nesu.
Vacuum evaporation coating ndeyekupisa zvinhu kuti zvibudiswe kune imwe tembiricha nenzira yekudziisa kupisa kana electron beam uye laser bombardment munzvimbo ine vacuum degree isingasviki 10-2Pa, kuitira kuti thermal vibration simba remamorekuru kana. maatomu ari muchinhu anodarika simba rinosunga repamusoro, zvekuti nhamba huru yemamorekuru kana maatomu anonyungudika kana kuti sublimate, uye akananga pane substrate kugadzira firimu.Ion sputtering coating inoshandisa kumhanyisa-kumhanya kwemaion akanaka anogadzirwa nekubuda kwegasi pasi pechiito chemunda wemagetsi kubhomba chinangwa se cathode, zvekuti maatomu kana mamorekuru ari muchinangwa anopukunyuka uye anonaya pamusoro pechishandiso chakaputirwa kuti aumbe. firimu rinodiwa.
Iyo inonyanya kushandiswa nzira yevacuum evaporation coating ndeyekupokana kupisa, iyo ine zvakanakira chimiro chakareruka, yakaderera mutengo uye nyore kushanda;Izvo zvakashata ndezvekuti hazvina kukodzera simbi dzinoramba uye tembiricha inodzivirira dielectric zvinhu.Electron danda kudziyisa uye laser kudziyisa anogona kukunda zvikanganiso zvekuramba kudziyisa.Mukudziyisa maerekitironi danda, danda reerekitironi rakatariswa rinoshandiswa kupisa zvakananga zvinhu zvakabhombwa, uye simba rekinetic re electron danda rinova simba rekupisa, rinoita kuti zvinhu zvinyunguduke.Laser kudziyisa kunoshandisa yakakwirira-simba laser sosi yekudziya, asi nekuda kwemutengo wakakwira we-laser-simba, inogona kungoshandiswa mumarabhoritari mashoma ekutsvagisa parizvino.
Sputtering tekinoroji yakasiyana neyevacuum evaporation tekinoroji.“Sputtering” zvinoreva chiitiko chekuti zvidimbu zvinochaja zvinobhomba nzvimbo yakasimba (chinangwa) uye kuita maatomu akasimba kana mamorekuru anopfura kubva pamusoro.Zvizhinji zvezvimedu zvinobudiswa zviri muatomu, iyo inowanzonzi maatomu akaparara.Zvimedu zvakapwanyiwa zvinoshandiswa kubhomba zvinonangwa zvinogona kuve maerekitironi, maion kana zvimedu zvisina kwazvakarerekera.Nekuti maion ari nyore kumhanyisa pasi pemunda wemagetsi kuti awane simba rekinetic rinodiwa, mazhinji acho anoshandisa ions sezvimedu zvinobhomba.Sputtering process yakavakirwa pakubuda kunopenya, kureva kuti, sputtering ions inobva pakubuda kwegasi.Akasiyana matekinoroji ekupuruzira anotora akasiyana kupenya ekuburitsa modhi.DC diode sputtering inoshandisa DC glow discharge;Triode sputtering imvura inopenya inotsigirwa necathode inopisa;RF sputtering inoshandisa RF glow discharge;Magnetron sputtering inopenya inodzorwa ne annular magnetic field.
Kuenzaniswa nevacuum evaporation coating, sputtering coating ine zvakawanda zvakanaka.Semuyenzaniso, chero chinhu chinogona kupfachuka, kunyanya zvinhu nemakomboni ane high melting point uye low vapor pressure;Iko kunamatira pakati pefirimu yakasvibiswa uye substrate yakanaka;High film density;Ukobvu hwefirimu hunogona kudzorwa uye kudzokorora kwakanaka.Izvo zvisingabatsiri ndezvekuti michina yakaoma uye inoda ma-high-voltage madivayiri.
Pamusoro pezvo, musanganiswa we evaporation nzira uye sputtering nzira ndeye ion plating.Zvakanakira nzira iyi ndezvekuti iyo firimu yakawanikwa ine yakasimba adhesion ne substrate, yakakwirira deposition rate uye yakakwirira firimu density.
Nguva yekutumira: Jul-20-2022