Titanium aluminium alloy ndeye alloy sputtering chinangwa chevacuum deposition.Titanium aluminium alloy zvinangwa zvine hunhu hwakasiyana zvinogona kuwanikwa nekugadzirisa zvirimo zvetitanium nealuminium mune iyi alloy.Titanium aruminiyamu intermetallic komisheni yakaoma uye brittle zvinhu zvine kunaka kupfeka kuramba.Iwo akaputirwa nedhizaini yetitanium aluminium intermetallic makomisheni pamusoro peyakajairwa kucheka maturusi, ayo anogona kunyatso kuwedzera hupenyu hwebasa rezvishandiso.Kana sputtering ichiitwa nenitrogen discharge arc kutanga, kuomarara kwakanyanya uye kuderera kwakadzika coefficient yechiso chemeso mask inogona kuwanikwa, iyo inonyanya kukodzera kupfekedzwa kwepamusoro kwezvishandiso zvakasiyana-siyana, mold uye zvimwe zvikamu zvinotambura.Naizvozvo, ine tarisiro yakanaka yekushandisa muindasitiri yemachining.
Kugadzirira kwetitanium aluminium alloy targets kwakaoma.Zvinoenderana nechikamu chechidimbu chetitanium aluminium alloy, akasiyana intermetallic makomisheni anogona kuumbwa pakati petitanium nealuminium, zvichitungamira mukugadzirisa brittleness mutitanium aluminium alloy.Kunyanya kana iyo aruminiyamu yemukati mune alloy inodarika 50% (atomic ratio), iyo oxidation kuramba yealloy inodzikira kamwe kamwe uye oxidation yakanyanya.Panguva imwecheteyo, iyo exothermic yekuwedzera panguva yealloying process inogona kuburitsa mabubbles, shrinkage pores, uye porosity, zvichikonzera porosity yakakwira yealloy uye kusakwanisa kuzadzisa density zvinodiwa zvechinhu chakanangwa.Pane nzira mbiri huru dzekugadzirira titanium aluminium alloys:
1、 Yakasimba ikozvino kudziyisa nzira
Iyi nzira inoshandisa mudziyo unogona kuwana yakakwira ikozvino, iyo inopisa titanium poda uye aluminium poda, inoshandisa kudzvanywa, uye inoita kuti aluminium uye titanium iite kuti igadzire titanium aluminium alloy targets.Kuwanda kwetitanium aluminium alloy target product yakagadzirirwa nenzira iyi> 99%, uye saizi yezviyo ndeye ≤ 100 μ m.Kuchena>99%.Kuumbwa kwetitanium aluminium alloy target material ndeye: titanium content ye5% kusvika 75% (atomic ratio), uye imwe yose ndeye aluminium content.Iyi nzira ine mutengo wakaderera uye yakakwira chigadzirwa density, uye inogona kuzadzisa zvizere zvinodiwa zvehukuru-hukuru hwekugadzira maindasitiri.
2, Kupisa isostatic kudzvanya sintering nzira
Iyi nzira inosanganisa titanium poda nealuminium poda, yobva yaiswa poda, kutonhora isostatic kudzvanya pre kudzvanya, degassing process, uyezve inopisa isostatic yekutsikirira kuumba.Pakupedzisira, sintering uye kugadzirisa kunoitwa kuti uwane titanium aluminium alloy zvinangwa.Iyo titanium aluminium alloy target yakagadzirirwa nenzira iyi ine hunhu hwehupamhi hwepamusoro, hapana pores, hapana porosity uye kupatsanurwa, yunifomu kuumbwa, uye zviyo zvakanaka.Iyo inopisa isostatic yekutsikirira nzira parizvino ndiyo nzira huru yekugadzirira titanium aruminiyamu alloy sputtering zvinangwa zvinodiwa neindasitiri yekukoira.
Nguva yekutumira: May-10-2023