Vazhinji vashandisi vanofanira kunge vakanzwa nezve chigadzirwa chekupopotera chinangwa, asi musimboti wekupopotera chinangwa unofanirwa kunge usina kujaira.Zvino, mupepeti weRich Special Material(RSM) inogovera magnetron sputtering misimboti ye sputtering chinangwa.
Iyo orthogonal magineti munda uye yemagetsi munda inowedzerwa pakati peyakaputswa yakanangwa electrode (cathode) uye anode, inodiwa inert gasi (kazhinji Ar gasi) inozadzwa mukamuri yekuvharira yakakwira, iyo inogara magineti inoumba 250 ~ 350 Gauss magineti pa. pamusoro peiyo data yakanangwa, uye iyo orthogonal electromagnetic munda inoumbwa neiyo yakakwira-voltage yemagetsi munda.
Pasi pekuita kwemunda wemagetsi, Ar gasi inoiswa ion kuita maioni akanaka uye maerekitironi.Imwe yakashata yakakwira voltage inowedzerwa kune chinangwa.Mhedzisiro yemagnetic field pamaerekitironi anobudiswa kubva padanda rinotarirwa uye mukana weionization wekushanda gasi kuwedzera, kuumba high-density plasma pedyo ne cathode.Pasi pesimba reLorentz simba, maA ions anomhanyisa kusvika parinotariswa uye anobhomba parinotariswa nekumhanya kwakanyanya, Maatomu akapushwa ari pachinangwa anotevera musimboti wekutendeuka uye obhururuka kubva panzvimbo yakanangwa kuenda kune substrate ine simba repamusoro rekinetic. kuisa mafirimu.
Magnetron sputtering inowanzokamurwa kuita marudzi maviri: Tributary sputtering uye RF sputtering.Nheyo yemidziyo yekupopotera iri nyore, uye mwero wayo unokurumidza zvakare pakupfira simbi.RF sputtering inoshandiswa zvakanyanya.Kuwedzera kune sputtering conductive zvinhu, inogona zvakare sputter isiri-conductive zvinhu.Panguva imwecheteyo, inoitisa reactive sputtering kugadzirira zvinhu zveokisi, nitrides, carbides uye mamwe makomisheni.Kana iyo RF frequency yakawedzera, inova microwave plasma sputtering.Iye zvino, electron cyclotron resonance (ECR) microwave plasma sputtering inowanzoshandiswa.
Nguva yekutumira: May-31-2022