Iyo yekungwarira yeAlloy Targets

1. Kugadzirira kweSputtering

Zvinonyanya kukosha kuchengetedza vacuum chamber, kunyanya sputtering system yakachena.Chero zvisaririra zvinogadzirwa nemafuta ekuzora, guruva uye yakapfuura yekuputira inounganidza mhute yemvura uye zvimwe zvinosvibisa, izvo zvinozokanganisa zvakananga dhigirii revacuum uye kuwedzera mukana wekutadza kwekugadzira firimu.Short circuit kana target arcing, rough film surface uye yakanyanyisa kusvibiswa kwemakemikari zvemukati zvinowanzokonzerwa nechamber yekusvipa isina kuchena, pfuti yekupopota uye chinangwa.Kuti ubatisise kuumbwa kwemaitiro ekuputira, zvakakosha kuchenesa uye kuomesa gasi rinoputika (argon kana oksijeni).Mushure mekunge substrate yaiswa mukamuri yekuputira, mhepo inoda kuburitswa kuti isvike pakutsvaira kunodiwa nekuita.Chivharo chekudzivirira munzvimbo ine rima, madziro emadziro uye pedo nepamusoro inodawo kucheneswa.Kana tichichenesa imba yekutsvaira, isu tinokurudzira kushandisa girazi bhora kuputika kuputika kuchenesa nzvimbo dzine guruva, pamwe nemhepo yakamanikidzwa kubvisa masara ekutanga ekuputira akatenderedza kamuri, uye chinyararire kupuruzira kunze nealumina impregnated sandpaper.Mushure mekupukuta pepa re gauze, rinocheneswa nedoro, acetone uye mvura yakasvibiswa.Pamwe chete, inotsigira kushandiswa kweindasitiri vacuum cleaner yekubatsira kuchenesa.Zvinangwa zvinogadzirwa neGaozhan simbi zvakazara mumabhegi epurasitiki akavharwa,

Yakavakwa mumhepo inodzivirira hunyoro.Paunenge uchishandisa chinangwa, tapota usabata chinangwa zvakananga neruoko rwako.Ongorora: paunenge uchishandisa chinangwa, ndapota pfeka dzakachena uye lint emahara ekugadzirisa magurovhosi.Usambofa wakabata chinangwa zvakananga nemaoko ako

2, Chinangwa chekuchenesa

Chinangwa chekuchenesa chinangwa ndechekubvisa guruva kana tsvina inogona kunge iripo pamusoro pechinangwa.

Iyo simbi inonangwa inogona kucheneswa mumatanho mana,

Danho rekutanga nderekuchenesa nemucheka wakasununguka wakasununguka wakanyoroveswa muacetone;

Danho rechipiri rakafanana nedanho rekutanga, kuchenesa nedoro;

Danho rechitatu: chenesa nemvura yakasvibiswa.Mushure mekugeza nemvura yakasvibiswa, isa chinangwa muchoto uye woomesa pa 100 ℃ kwemaminitsi makumi matatu.

Kucheneswa kweokisidhi uye zvinangwa zveceramic zvichaitwa ne "lint yemahara jira".

Nhanho yechina ndeyekushambidza chinangwa neargon nepamusoro-soro uye gasi remvura yakadzika mushure mekubvisa nzvimbo ine guruva, kuitira kuti kubvisa tsvina yose inogona kuita arc mu sputtering system.

3, Chigadzirwa chechinangwa

Mukuita kwekumisikidzwa kwechinangwa, Z dzakakosha dziviriro ndeyekuona yakanaka yekupisa conduction yekubatanidza pakati pechinangwa uye madziro anotonhorera epfuti inoputika.Kana iyo warpage yetsvimbo yekutonhodza yakanyanyisa kana warpage yeplate yekumashure yakanyanyisa, chinonangwa mudziyo chinotsemuka kana kukotama, uye thermal conductivity kubva kumashure kune chinangwa chinokanganiswa zvakanyanya, zvichikonzera kutadza kwekupisa kupisa. mukupopota, uye chinangwa chinotsemuka kana kupotsa

Kuti uve nechokwadi chekupisa kwekushisa, pepa re graphite rinogona kuiswa pakati pe cathode cooling wall uye chinangwa.Ndapota teererai kunyatsotarisa uye kujekesa flatness yemadziro ekutonhora kwepfuti inoputika inoshandiswa kuve nechokwadi chokuti O-ring inogara iripo.

Sezvo kuchena kwemvura inotonhorera inoshandiswa uye guruva rinogona kuitika panguva yekushanda kwemidziyo ichaiswa mu cathode inotonhorera tangi yemvura, zvinodikanwa kutarisa uye kuchenesa cathode inotonhorera tangi yemvura paunenge uchiisa chinangwa kuti uve nechokwadi chekuti inotonhorera. kutenderera kwemvura inotonhorera uye kuti chinopinda nekubuda nacho hazvivharwe.

Mamwe macathode anorongwa kuti ave nenzvimbo diki ine anode, saka kana uchiisa chinangwa, zvinodikanwa kuve nechokwadi kuti hapana kubata kana conductor pakati pecathode uye anode, kana zvisina kudaro pfupi pfupi ichaitika.

Tarisa kune Chinyorwa chemushandisi wemidziyo kuti uwane ruzivo rwemashandisirwo echinangwa nemazvo.Kana pasina ruzivo rwakadaro mubhuku rekushandisa, ndapota edza kuisa chigadziro maererano nemazano akakodzera anopiwa neGaozhan simbi.Paunenge uchisimbisa chigadziriso, tanga wasunga bhaudhi rimwe neruoko, wobva wasunga rimwe bhaudhi padiagonal neruoko.Dzokorora izvi kusvikira mabhoti ose ari pachigadziro asimbiswa, uye ipapo simbisa nechimwe chinhu.

4, Short circuit uye tightness kuongorora

Mushure mekupedzwa kwechinhu chinotarirwa, chinodiwa kutarisa pfupi pfupi uye kusimba kweiyo cathode yese,

Inorongedzerwa kuona kana paine dunhu diki mu cathode nekushandisa mita yekupikisa

Row rusarura.Mushure mekusimbisa kuti hapana dunhu diki mu cathode, kuona kudonha kunogona kuitwa, uye mvura inogona kuunzwa mu cathode kuti ione kana paine kubuda kwemvura.

5, Target pre sputtering

Target pre sputtering inotsigira pure argon sputtering, iyo inogona kuchenesa pamusoro pechinangwa.Kana chinangwa chikafa, chinosimudzirwa kuti chiwedzere zvishoma nezvishoma simba rekupopota, uye simba rekuwedzera chiyero checeramic chinangwa 1.5WH / cm2.Iyo pre sputtering yekumhanyisa kwesimbi inotangwa inogona kunge yakakwira kupfuura yeceramic target block, uye inonzwisisika simba rekuwedzera chiyero ndeye 1.5WH / cm2.

Mukuita pre sputtering, isu tinofanirwa kutarisa arcing yechinangwa.Nguva yepresputtering inowanzoita maminetsi gumi.Kana pasina arcing phenomenon, ramba uchiwedzera iyo sputtering simba

Kusimba rakaiswa.Zvinoenderana neruzivo, iyo inogamuchirwa Z yakakwirira sputtering simba resimbi inonangwa ndeye

25watts / cm2, 10watts / cm2 yechinangwa checeramic.Ndokumbira utarise kune yekumisikidza uye ruzivo rwevacuum chamber kudzvanywa panguva yekupopota mune yevashandisi system yekushandisa manual.Kazhinji, zvinofanirwa kuve nechokwadi kuti tembiricha yemvura pakubuda kwemvura inotonhorera inofanira kunge yakaderera pane 35 ℃, asi Z zvakakosha kuve nechokwadi chekuti inotenderera yemvura inotonhorera inogona kushanda nemazvo.

Iko kukurumidza kutenderera kwemvura inotonhorera inobvisa kupisa, inova vimbiso yakakosha yekuvimbisa kuenderera mberi kwekuputika nesimba guru.Nokuda kwezvinangwa zvesimbi, zvinowanzokurudzirwa kuti mvura inotonhorera inoyerera ndeye

20lpm dzvinyiriro yemvura inenge 5gmp;Kune zvibodzwa zveceramic, zvinowanzo kurudzirwa kuti kuyerera kwemvura kuri 30lpm uye kudzvanywa kwemvura kunenge 9gmp.

6, Target kugadzirisa

Kuti udzivise kupfupika kutenderera uye arcing kunokonzerwa negomba risina kuchena mukuita sputtering, zvinofanirwa kubvisa sputter yakaunganidzwa pakati uye mativi ese eiyo sputtering track mumatanho,

Izvi zvinobatsirawo vashandisi kuenderera mberi sputter paz yakakwirira simba density

7, Chengetedza chengetedzo

Zvinangwa zvakapihwa neGaozhan simbi zvakaiswa mumabhegi epurasitiki maviri-layer vacuum.Isu tinokurudzira kuti vashandisi vachengete zvinangwa, ingave simbi kana ceramic, mune vacuum packaging.Kunyanya, zvibodzwa zvekubatanidza zvinoda kuchengetwa pasi pevacuum mamiriro ekudzivirira oxidation ye bonding layer kubva pakukanganisa kunaka kwekubatana.Nezve kurongedza kwesimbi dzakatarwa, isu tinokurudzira kuti Z inofanirwa kuiswa mumabhegi epurasitiki akachena.