Chinangwa chine musika wakakura, nzvimbo yekushandisa uye budiriro huru mune ramangwana.Kuti ikubatsire kuve nekunzwisisa zvirinani mabasa anotangwa, pano pazasi iyo RSM injinjini inozivisa muchidimbu izvo zvakakosha zvinoshanda zvechinangwa.
Kuchena: kuchena ndeimwe yezvinonyanya kushanda zviratidzo zvechinangwa, nokuti kuchena kwechinangwa kune simba guru pane basa refirimu.Zvisinei, mukushandiswa kunoshanda, zvinodiwa zvekuchena kwechinangwa zvakasiyanawo.Semuyenzaniso, nekukurumidza kukura kweindasitiri yemagetsi emagetsi, saizi yesilicon wafer inowedzerwa kubva pa6 "kusvika pa8" kusvika pa12 ", uye hupamhi hwewaya hunoderedzwa kubva pa0.5um kusvika 0.25um, 0.18um kana kunyange 0.13um.Kare, 99.995% yekunatswa kwechinangwa kunogona kusangana nezvinodiwa zve 0.35umic, nepo kugadzirirwa kwemitsara ye0.18um inoda 99.999% kana kunyange 99.9999% yechinangwa chekuchena.
Kusachena kwemukati: kusvibiswa mune zvakanangwa zvakaonda uye okisijeni uye mhute yemvura mumapores ndiwo makuru ekusvibisa masosi emafirimu akaiswa.Zvinangwa zvezvinangwa zvakasiyana zvine zvinodiwa zvakasiyana kune zvakasiyana siyana zvemukati.Semuyenzaniso, aruminiyamu yakachena uye aruminiyamu alloy zvinangwa zvinoshandiswa mu semiconductor indasitiri zvine zvakakosha zvinodiwa kune alkali simbi yemukati uye radioactive chinhu chemukati.
Density: kuti uderedze ma pores muchinangwa chakasimba uye uvandudze basa re sputtering firimu, chinangwa chinowanzodiwa kuve nepamusoro density.Density yechinangwa hachingokanganisa sputtering rate, asiwo inokanganisa magetsi uye optical mabasa emufirimu.Iyo yakakwirira iyo inotarirwa density, zviri nani basa remufirimu.Mukuwedzera, kuwanda uye kusimba kwechinangwa kunovandudzwa kuitira kuti chinangwa chigone kugamuchira zviri nani kushushikana kwekushisa mukuita sputtering.Density zvakare imwe yeakakosha anoshanda zviratidzo zvechinangwa.
Nguva yekutumira: May-20-2022